| 摘要 |
PURPOSE:To reduce contact resistance and improve static electricity tolerance quantity by making the shape of a contact larger than the contact of minimum rule which is used in an actual element. CONSTITUTION:Contacts 114, 115, 116, 117 are made larger than the size of minimum rule which is used in an actual element. That is, the contacts 114, 115 are formed to be rectangles whose sides facing each other are made as long as possible. Thereby static electricity applied to a drain 206 is not concentrated but dispersed from the drain 206 to a source 207 by the amount of length of the sides where the contacts 114 and 115 face each other. Hence Joule heat is dispersed and local heating is not caused, so that the channel part or the gate electrode of an MOS-FET acting as a current path of the static electricity can be made hard to be broken down. |
