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经营范围
发明名称
CVD DEVICE
摘要
申请公布号
JPH0544038(A)
申请公布日期
1993.02.23
申请号
JP19910204491
申请日期
1991.08.14
申请人
TOSHIBA CORP
发明人
NIBARI IKUO;SATO MITSUO;OMINE TOSHIMITSU
分类号
C23C16/44;C23C16/455;C23C16/46;C30B25/12;H01L21/205;H01L21/31;H01L21/316
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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