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发明名称
APPARATUS FOR CRYSTAL-GROWTH WITH MOLECULAR BEAM
摘要
申请公布号
JPH0543388(A)
申请公布日期
1993.02.23
申请号
JP19910197781
申请日期
1991.08.07
申请人
BABCOCK HITACHI KK
发明人
TEZENI YUUTA;ADAKA SABURO
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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