| 摘要 |
<p>PURPOSE:To make the title sensor small in size, to make it possible to raise the temperature of a vibrator to a desired temperature with low consumption of power and to improve the responsiveness of a vibration frequency to a change in a flow rate. CONSTITUTION:Vibrators 37 and 38 are formed in a crystal plate 30 and electrodes 39A and 39B for vibration driving are provided on the opposite sides of the vibrator 37, while electrodes 40A and 40B for vibration driving are provided on the opposite sides of the vibrator 38. Moreover, a heater 45 is provided on the upper surface of the electrode 39A for vibration driving with an insulating protection film 43 interlaid, while a heater 46 is provided on the upper surface of the electrode 40A for vibration driving with an insulating protection film 44 interlaid.</p> |
