SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF

摘要

PURPOSE:To provide a semiconductor material which is excellent in an electric characteristic, especially a semiconductor material which is formed to be filmlike. CONSTITUTION:A semiconductor material is formed in the following manner: a semiconductor film 103 is formed on a thermally contractible insulating material 102; after that, the insulating material 102 and the semiconductor film 103 are patterned; and, after that, a heating treatment is executed at a thermal contraction temperature or higher.