MODULARE FOERDER- UND BEABEITUNGSANLAGE FUER HALBLEITERWAFER.,申请号DE19873783440-传众专利搜索

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发明名称	MODULARE FOERDER- UND BEABEITUNGSANLAGE FUER HALBLEITERWAFER.
摘要
申请公布号	DE3783440(D1)	申请公布日期	1993.02.18
申请号	DE19873783440	申请日期	1987.04.06
申请人	VARIAN ASSOCIATES	发明人	STARK R;TURNER FREDERICK
分类号	B65G1/06;B65G47/91;C23C14/56;H01L21/677;(IPC1-7):B65G1/06	主分类号	B65G1/06
代理机构		代理人
主权项
地址

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