| 摘要 |
<p>Primary molecules are formed by sublimation in a sublimation chamber (2), then transferred in the form of a transfer stream to a cracking head (10) having a higher temperature for transformation into lighter secondary molecules in order to form molecular beams (16). According to the invention, the transfer stream is regulated by adjusting an actual stream vector which is that of a vector gas introduced into the sublimation chamber through a feed tube (26) and extracted by an extraction tube (30). Application especially in the production by molecular beam epitaxy of semiconductor components of the III-V Type.</p> |
