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发明名称
摘要
申请公布号
JPH0511661(B2)
申请公布日期
1993.02.16
申请号
JP19860299231
申请日期
1986.12.15
申请人
NIPPON ELECTRIC CO
发明人
KONO HIROMICHI
分类号
H01L21/60;H01L21/603
主分类号
H01L21/60
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