发明名称 METHOD FOR METALLIZING SUPERCONDUCTING MATERIAL INTO SURFACE OF SUBSTRATE BY USE OF PLASMA PHENOMENON
摘要 <p>A method for metallizing a superconducting material onto a surface of a substrate by the use of the plasma phenomenon, which comprises the steps of: continuously supplying an operating gas containing an oxygen gas in an amount of at least 30 vol.% into a bore of a metallizing nozzle from a rear end portion thereof; continuously supplying powder of a composite oxide superconducting material containing a CuxOy radical into the bore of the metallizing nozzle from a tip portion thereof; producing an electric arc in the bore of the metallizing nozzle to convert the operation gas into a high-temperature plasma; melting the powder of the superconducting material supplied into the bore by means of the operating gas converted into plasma; uniformly blowing the thus melted powder of the superconducting material from the metallizing nozzle onto a surface of a substrate by means of a jet of the operating gas converted into plasma to form a film of the superconducting material onto the surface of the substrate; and heating the thus formed film of the superconducting film to a temperature of at least 700 DEG C, and then slowly cooling the thus heated film to the room temperature at a cooling rate of up to 40 DEG C/minute.</p>
申请公布号 KR930001012(B1) 申请公布日期 1993.02.12
申请号 KR19880017230 申请日期 1988.12.22
申请人 NKK CORP. 发明人 TACHIGAWA, KYOJI;SHINBO, YUKIO;MATSUDA, YUDAKA;KABASAWA, MAKODO;GOSUKE, SHIGEYOSHI;WATANABE, ITARU
分类号 C01G1/00;C01G3/00;C04B35/45;C23C4/10;C23C4/18;H01B12/06;H01B13/00;H01F6/06;H01L39/24;(IPC1-7):C23C4/10 主分类号 C01G1/00
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