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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0536615(A)
申请公布日期
1993.02.12
申请号
JP19910191828
申请日期
1991.07.31
申请人
MATSUSHITA ELECTRON CORP
发明人
TANPO TOSHIHARU
分类号
H01L21/265;H01L21/324
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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