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发明名称
METHOD AND APPARATUS FOR BURN-IN
摘要
申请公布号
JPH0536773(A)
申请公布日期
1993.02.12
申请号
JP19910187881
申请日期
1991.07.26
申请人
SUMITOMO ELECTRIC IND LTD
发明人
NISHIGUCHI KATSUNORI;HASHINAGA TATSUYA
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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