| 摘要 |
<p>A method for measuring the deviation ( ) between elements (22a,22b,22c) on an object (2) includes the steps of forming at least a first optical element (22a,22b) on the object; forming at least a second optical element (22c) on the object, the first and second optical elements having lens fonctions; projecting light beams onto the first and second optical elements on the object and detecting the incident positions of light beams (B1,B2,B3) travelling from the first and second optical elements, having been subjected to the lens functions of the first and second optical elements, on a predetermined surface; and detecting the deviation between the first and second optical elements on the object from the relationship between the detected incident positions of the light beams. <IMAGE></p> |
