发明名称 |
Process for preparing an electroluminescent thin film |
摘要 |
A process is provided for preparing uniform and homogeneous thin films such as ZnS:M film on the substrates having a large area by CVD under a reduced pressure, wherein as many plural substrates as possible can be subjected to the CVD treatment in the same apparatus without decreasing a growth rate of the film. Accordingly, EL displays having a large area which possess a high quality and can be manufactured efficiently.
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申请公布号 |
US5185181(A) |
申请公布日期 |
1993.02.09 |
申请号 |
US19910721711 |
申请日期 |
1991.06.26 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
MIKAMI, AKIYOSHI;TERADA, KOUSUKE;OKIBAYASHI, KATSUSHI;TANAKA, KOICHI;YOSHIDA, MASARU;NAKAJIMA, SHIGEO |
分类号 |
H05B33/10;C23C16/30;C23C16/44;C23C16/455;H05B33/12;H05B33/14 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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