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发明名称
ION PROCESSING UNIT
摘要
申请公布号
JPH0528954(A)
申请公布日期
1993.02.05
申请号
JP19910206436
申请日期
1991.07.22
申请人
NISSIN ELECTRIC CO LTD
发明人
HIKAWA KAZUNORI
分类号
H01J37/317;H01L21/265;H01L21/66
主分类号
H01J37/317
代理机构
代理人
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地址
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