发明名称 PHOTOSENSITIVE COMPOSITION
摘要 PURPOSE:To obtain a photosensitive compsn. having high sensitivity and excellent resolving power. CONSTITUTION:This photosensitive compsn. is a positive type photosensitive compsn. contg. a compd. having 1,2-naphthoquinone-2-diazido-4- and/or-5- disulfonyl group represented by a formula A-(SO2-SO2-D)n (where D is 1,2- naphthoquinone-2-diazido-4-yl or 1,2-naphthoquinone-2-diazido-5-yl, A is n-valent aliphatic or arom. hydrocarbon and(n) is an integer or >=1).
申请公布号 JPH0527425(A) 申请公布日期 1993.02.05
申请号 JP19910007179 申请日期 1991.01.24
申请人 FUJI PHOTO FILM CO LTD 发明人 AOSO TOSHIAKI;MIZUTANI KAZUYOSHI
分类号 G03F7/022;H01L21/027;H01L21/30 主分类号 G03F7/022
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