,申请号DE19904031163-传众专利搜索

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发明名称
摘要
申请公布号	DE4031163(C2)	申请公布日期	1993.02.04
申请号	DE19904031163	申请日期	1990.10.03
申请人	SPEEDFAM CO., LTD., TOKIO/TOKYO, JP	发明人	HAKOMORI, SHUNJI;MAEDA, SEIICHI;NAGAHASHI, ISAO, AYASE, KANAGAWA, JP
分类号	B24B9/06;B24B29/04	主分类号	B24B9/06
代理机构		代理人
主权项
地址

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