| 摘要 |
PURPOSE:To easily replace an element by simplify an array of plural detecting elements and wiring of each preamplifier, and facilitating the assembly of the whole of a detector part. CONSTITUTION:Plural semiconductor substrates 1 having the 1st and the 2nd parallel plane electrodes 2 and 3 opposite each other are arrayed in one line in the 1st direction parallel to surface of electrodes 2 and 3. The substrates 1 are sandwiched between a couple of the 1st and the 2nd insulating plates 4 and 6 and this assembly is arrayed in parallel in the 2nd direction perpendicular to the surfaces of the electrodes 2 and 3. A conductor 5 which extends in the 1st direction is formed on the inside surface of the insulating plate 4 and connected to the electrode 2 of the substrate 1 and a coordinate position signal of the 2nd direction is led out of the conductor; and a conductor 5 separated in the 1st direction corresponding to the electrode 3 is formed on the inside surface of the insulating plate 6 and connected to the electrode 3 of the corresponding substrate 1, conductors 5 on the insulating plate 6 at the same position in the 1st direction are connected to a common signal line, and a coordinate position signal of the 1st direction is led out, thereby facilitating the replacement of the element. |
