| 摘要 |
<p>PURPOSE:To draw a paste pattern uniformized in cross sectional shape as a whole. CONSTITUTION:A substrate 2 can move in two directions, i.e., X-axis and Y-axis directions, with respect to the tip end of a nozzle. A paste is delivered from the tip end of the nozzle to fall on a paste application point 4a on the substrate 2. By moving the substrate 2, a paste pattern is drawn on the substrate 2. An optical displacement gauge 6 is provided on a Z-axis table provided with the nozzle. A light from a light-projecting part 6a thereof is reflected by a measurement point 6c on the substrate 2 and received by a light-receiving part 6b. In this manner, the optical displacement gauge 6 measures a gap between the tip end of the nozzle and the substrate 2. The measurement point 6c is positioned in a direction different from the moving direction of the substrate 2 by an angle theta with respect to the paste application point 4a, and the angle thetais set to approximately 45 degrees. In this manner, regardless of the moving direction of the substrate 2, the measurement point 6c can be prevented from coming close to or across the paste pattern.</p> |
