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经营范围
发明名称
MICROWAVE PLASMA DEVICE
摘要
申请公布号
JPH0525646(A)
申请公布日期
1993.02.02
申请号
JP19910077688
申请日期
1991.04.10
申请人
SUMITOMO METAL IND LTD
发明人
INOUE TAKU;MIYAMURA TADASHI
分类号
C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H05H1/46
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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