| 摘要 |
<p>PURPOSE:To improve the quality and the reliability of a substrate by using a material, which hardly adsorbs cleaning chemicals, or a materials whose surface is a complete smooth face, for the contact part between a holder and the substrate. CONSTITUTION:The inwall 3 of a triangular groove 4, which is the contact part between a substrate holder holding a substrate to be treated with chemicals and the substrate, is plated with a foil 6 of gold or the like. Moreover, a plated face 7 consisting of platinum or the like is made all over the surface of a rectangular groove 4. Alternatively, platinum can be deposited thin by sputtering. Further alternatively, depending upon the kind of the of cleaning chemicals, the materials 8 having the groove 4 is made of hard metal such as tantalum, titanium, etc., and it is fitted in the inwall 3 of the holder. By such a method as is mentioned above, a material, which hardly adsorbs cleaning chemicals, or a materials whose surface is a complete smooth face, is used. Hereby, the adhesion of foreign matter to the holder for cleaning the substrate decreases, and the quality and the reliability of the semiconductor substrate improve.</p> |
