| 发明名称 |
PLASMA PROCESSOR |
| 摘要 |
|
| 申请公布号 |
JPH0521394(A) |
申请公布日期 |
1993.01.29 |
| 申请号 |
JP19910175615 |
申请日期 |
1991.07.16 |
| 申请人 |
NEC CORP |
发明人 |
TERAOKA ARITONO |
| 分类号 |
H01L21/302;H01L21/3065 |
主分类号 |
H01L21/302 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
您可能感兴趣的专利
RELAY CONTROL UNIT, RELAY CONTROL SYSTEM, RELAY CONTROL METHOD, AND RELAY CONTROL PROGRAM
CLOCK GATING FOR SYSTEM-ON-CHIP ELEMENTS
SEAMLESS MIGRATION FROM RAPID SPANNING TREE PROTOCOL TO ETHERNET RING PROTECTION SWITCHING PROTOCOL
API PROVIDER INSIGHTS COLLECTION
SPIRAL POLYNOMIAL DIVISION MULTIPLEXING
METHOD FOR TRANSMITTING DATA BETWEEN BASEBAND UNIT BBU AND REMOTE RADIO UNIT RRU, AND DATA TRANSMISSION APPARATUS
METHOD OF DEMODULATING A SIGNAL PACKET, A COMMUNICATION SYSTEM AND A LIGHTING DEVICE
USER STATION FOR A BUS SYSTEM AND METHOD FOR REDUCING LINE-CONDUCTED EMISSIONS IN A BUS SYSTEM
Secure Digital Signature Apparatus and Methods
METHOD, DEVICE, AND SYSTEM OF PROVISIONING CRYPTOGRAPHIC DATA TO ELECTRONIC DEVICES
EFFICIENT SHARING OF HARDWARE ENCRYPTION PIPELINE FOR MULTIPLE SECURITY SOLUTIONS
PROTECTION OF A RIJNDAEL ALGORITHM
TRANSMITTER, RECEIVING DEVICE, AND FREQUENCY OFFSET CORRECTION METHOD
SELECTIVE APPLICATION OF ERROR DETECTION AND CORRECTION FOR RADIO FREQUENCY IDENTIFICATION
NETWORK TEST INSTRUMENT WITH TESTING SESSION ANALYSIS
OPTICAL TRANSMITTER AND METHOD FOR ADJUSTING SIGNAL LEVELS
VISIBLE LIGHT RECEIVING METHOD
COMMUNICATION SYSTEM, COMMUNICATION APPARATUS, AND COMMUNICATION METHOD
OPTICAL SIGNAL MONITORING
Wireless data transfer
