VAPOR GROWING METHOD,申请号JP19910168282-传众专利搜索

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发明名称	VAPOR GROWING METHOD
摘要
申请公布号	JPH0521355(A)	申请公布日期	1993.01.29
申请号	JP19910168282	申请日期	1991.07.09
申请人	TOSHIBA CORP	发明人	KUSHIBE MITSUHIRO;FUNAMIZU MASAHISA
分类号	H01L21/205;H01S5/00	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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