发明名称 VORRICHTUNG UND VERFAHREN ZUM ABSCHNEIDEN VON DIAMANT.
摘要 A mixture of hydrogen and methane gases is subjected to combined thermal heating and microwave radiation to form a gas plasma which is caused to condense on a substrate as diamond form of carbon.
申请公布号 DE3781780(T2) 申请公布日期 1993.01.28
申请号 DE19873781780T 申请日期 1987.11.05
申请人 GENERAL ELECTRIC CO., SCHENECTADY, N.Y., US 发明人 ANTHONY, THOMAS RICHARD, SCHENECTADY NEW YORK 12309, US;DEVRIES, ROBERT CHARLES, BURNT HILLS NEW YORK 12027, US
分类号 C23C16/26;C23C16/27;C23C16/50;C23C16/511;C23C16/517;C30B25/10;C30B29/04 主分类号 C23C16/26
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