发明名称 APPARATUS AND METHOD FOR FOCUSING HARD X-RAYS
摘要 APPARATUS AND METHOD FOR FOCUSING HARD X-RAYS A dislocation-free, composite-substance crystal having a lattice constant which decreases over the length of the crystal (38) convergently focuses beams of hard X-rays or gamma rays (11). A single-substance, dislocation-free crystal (34) collimates diffuse beams of hard X-rays or gamma rays and projects the collimated radiation (11') to the focusing crystal (38). A mask (36) is interposed between the collimating crystal (34) and the focusing crystal (38) causing the collimated radiation (11'') to carry an image of the mask (36). The focusing crystal (38) produces a convergent hard X-ray beam or gamma ray beam (11''') to focus a reduced image of the mask (36) upon the photosensitive layer (41) of a water (39). An example of a dislocation-free crystal having a lattice constant which decreases over its length (38) is a dislocation-free silicongermanium crystal (20) wherein the proportion of germanium to silicon varies over the length of the crystal.
申请公布号 CA2089557(A1) 申请公布日期 1993.01.27
申请号 CA19922089557 申请日期 1992.06.15
申请人 HUGHES AIRCRAFT COMPANY 发明人 VALI, VICTOR;CHANG, DAVID B.;LAWRENCE, ALBERT F.
分类号 G03F7/20;G21K1/06;H01L21/027;(IPC1-7):G21K1/06 主分类号 G03F7/20
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