| 摘要 |
<p>PURPOSE:To provide an apparatus for purification of a gas, capable of reducing impurities, especially water in the purified gas and an operation method thereof. CONSTITUTION:In purification of a gas by circulating the gas to be purified through a purification cylinder composed of reaction cylinders 1a and 1b and adsorption cylinders 2a and 2b, the objective purification is started by, after baking operation in which the secondary side pipe of the above-mentioned purification cylinder is heated by a heater (S) while circulating a purging gas every purification operation, circulating the gas to be purified.</p> |
