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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0513368(A)
申请公布日期
1993.01.22
申请号
JP19910226719
申请日期
1991.09.06
申请人
NEC CORP
发明人
ITO NOBUKAZU
分类号
C23C14/06;C23C14/34;H01L21/28;H01L21/285;H01L21/3205;H01L21/768;H01L23/52;H01L23/522
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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