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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0513705(A)
申请公布日期
1993.01.22
申请号
JP19910167317
申请日期
1991.07.09
申请人
FUJITSU LTD
发明人
SATO SHIGEO
分类号
H01L21/322;H01L27/10
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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