MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19910186971-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH0513429(A)	申请公布日期	1993.01.22
申请号	JP19910186971	申请日期	1991.07.02
申请人	OKI ELECTRIC IND CO LTD	发明人	IWAMURA SHIRO
分类号	H01L21/763;H01L21/331;H01L21/76;H01L29/73;H01L29/732	主分类号	H01L21/763
代理机构		代理人
主权项
地址

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