发明名称 HOLOGRAM PLOTTING DEVICE
摘要 PURPOSE:To obtain a hologram plotting device capable of accurately plotting at a high speed by using a hologram capable of forming an optional pattern instead of a lens. CONSTITUTION:On a device plotting the pattern by forming the irradiating area 14 of an energy flux localizing on a photosensitive material 15 and by making the photosensitive material 15 and the irradiating area 14 relatively move, the energy flux is image-formed on the irradiating area 14 by using the hologram 8.
申请公布号 JPH0511454(A) 申请公布日期 1993.01.22
申请号 JP19910165880 申请日期 1991.07.05
申请人 DAINIPPON PRINTING CO LTD 发明人 TANIGUCHI YUKIO
分类号 G03F1/00;G03F1/68;G03F7/20;H01L21/027 主分类号 G03F1/00
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