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发明名称
VERFAHREN ZUR DOTIERSTOFFKONZENTRATIONSBESTIMMUNG MITTELS AETZRATENBESTIMMUNG IN BORPHOSPHORSILIKATGLASSCHICHTEN FUER INTEGRIERTE HALBLEITER
摘要
申请公布号
DE4123228(A1)
申请公布日期
1993.01.21
申请号
DE19914123228
申请日期
1991.07.12
申请人
SIEMENS AG, 8000 MUENCHEN, DE
发明人
PROKSCHE, HARALD, DIPL.-CHEM., 8900 AUGSBURG, DE;ROSS, DETLEF, DR.RER.NAT., 8011 KIRCHHEIM, DE
分类号
H01L21/311
主分类号
H01L21/311
代理机构
代理人
主权项
地址
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