| 摘要 |
PURPOSE:To form an electrical wiring pattern with high precision and high reliability by one photo-mask by constituting an optical waveguide and even an electrical-wiring pattern susceptor besides a guide while using the same photoconductive film as a starting material. CONSTITUTION:Optical waveguides 2, guides 3, 5, 7 and electrical-wiring pattern susceptors 12a-12j are composed while employing the same quartz group glass film as a starting material. Consequently, the titled circuit is simplified structurally, also designed easily and fitted to mass production. A gold wire 14 represents an auxiliary wiring at a short distance connecting the electrical wiring patterns and a laser diode. Accordingly, reliability is improved largely. The electrical wiring patterns are insulated from a substrate 1 by the susceptors, and inhibit the crosstalks of APD output signals to a laser-diode driving signal. |
