| 摘要 |
PURPOSE:To form the small-sized optical system having excellent adhesion by forming the films of the optical elements of a flat plate type by a sol-gel method directly on a transparent substrate and integrating these elements. CONSTITUTION:A transparent glass substrate 1 having a reflection layer 13 in the lower part is masked by a resist 8. Lens parts and photodetecting parts are then masked by a hot meltable plastic film 10 and slit type polarizers 9 are deposited by evaporation to input parts and filter parts. After a PLZT soln. is applied thereon from above, the coating is dried and is further heated. PLZT sintered bodies 11 are formed by repeating the operations from the coating up to the sintering and electrodes 12 of a comb shape are deposited thereon. The plastic film 10 is then peeled and an SiO2 soln. is applied to the lens parts. After transfer is executed by using a stamper, the sintering is similarly executed to form the Fresnel type lenses 4, 6 are formed. A reflection layer is deposited thereon. Finally, photodetectors 7 are laminated by alignment. |
