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发明名称
RESIST COATING APPARATUS
摘要
申请公布号
JPH056854(A)
申请公布日期
1993.01.14
申请号
JP19910156391
申请日期
1991.06.27
申请人
SONY CORP
发明人
KAMIYA MASAYUKI
分类号
B05C5/00;B05B15/02;B05C11/08;G03F7/16;H01L21/027
主分类号
B05C5/00
代理机构
代理人
主权项
地址
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