发明名称 Method of measuring very small quantity of impurity in gas.
摘要 A method capable of accurately and inexpensively measuring a very small quantity of impurities, such as water, contained in chemical substances, which are gaseous at normal temperature and pressure, is provided. A concentration of a very small quantity of impurities, such as water, contained in said chemical substances, which are gaseous at normal temperature and pressure, is measured by introducing the chemical substances into a cell under the condition of liquefied gases to measure an electric conductivity of said liquefied gases. <IMAGE>
申请公布号 EP0522293(A2) 申请公布日期 1993.01.13
申请号 EP19920109581 申请日期 1992.06.05
申请人 OHMI, TADAHIRO;NIPPON SANSO CORPORATION;HORIBA, LTD. 发明人 OHMI, TADAHIRO;ISHIHARA, YOSHIO;FUKUSHIMA, RYOSUKE
分类号 G01N27/04;G01N27/06;G01N27/07;H01L21/302 主分类号 G01N27/04
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