发明名称 |
Method of measuring very small quantity of impurity in gas. |
摘要 |
A method capable of accurately and inexpensively measuring a very small quantity of impurities, such as water, contained in chemical substances, which are gaseous at normal temperature and pressure, is provided. A concentration of a very small quantity of impurities, such as water, contained in said chemical substances, which are gaseous at normal temperature and pressure, is measured by introducing the chemical substances into a cell under the condition of liquefied gases to measure an electric conductivity of said liquefied gases. <IMAGE> |
申请公布号 |
EP0522293(A2) |
申请公布日期 |
1993.01.13 |
申请号 |
EP19920109581 |
申请日期 |
1992.06.05 |
申请人 |
OHMI, TADAHIRO;NIPPON SANSO CORPORATION;HORIBA, LTD. |
发明人 |
OHMI, TADAHIRO;ISHIHARA, YOSHIO;FUKUSHIMA, RYOSUKE |
分类号 |
G01N27/04;G01N27/06;G01N27/07;H01L21/302 |
主分类号 |
G01N27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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