发明名称 Semiconductor device and manufacturing method thereof
摘要 There is disclosed a semiconductor device in which the resistance pattern on the semiconductor substrate is formed by the resistance film and the wiring pattern connected to the resistance pattern is formed by the resistance film and the conductive film deposited and formed thereon. Furthermore, a method of manufacturing such a semiconductor device by a photolithographic process is disclosed. In accordance with this method, after the resistance film is formed, a conductive film is formed thereon and the conductive film corresponding to the portion serving as a resistance element is removed. A convex portion may be provided on the insulating substrate, thus to form wiring only on this region or to form wiring only around this region.
申请公布号 US5179434(A) 申请公布日期 1993.01.12
申请号 US19910752969 申请日期 1991.08.29
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HIRUTA, YOICHI
分类号 H01L21/02;H01L21/768;H01L21/8244;H01L23/522;H01L23/64;H01L27/11 主分类号 H01L21/02
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