METHOD FOR POLISHING REAR SURFACE OF STAMPER FOR OPTICAL DISK

摘要

PURPOSE:To provide the method for polishing the rear surface of a stamper for optical disks which eliminates the slight ruggedness generated at the time of polishing on the rear surface side of the stamper and finishes the rear surface thereto to a specular surface. CONSTITUTION:An air bag 15 is provided in nearly the central part of a substrate 14 surface and a double coated tacky adhesive tape 16 is adhered thereto from the upper part thereof so as to enclose the air bag 15. A protective film 18 is formed on the surface on the side formed with the ruggedness of the stamper 17 and the surface formed with this protective film 18 is fixed onto the double coated tacky adhesive tape 16. The rear surface 17a side on the side opposite from the surface of the fixed stamper 17 is thereafter polished.