发明名称 GROOVE MACHINING METHOD FOR DYNAMIC PRESSURE FLUID BEARING
摘要 PURPOSE:To eliminate the discrepancy between the start and end of winding when a shaft is wound with a mask and to omit the trouble of winding by removing a dynamic pressure generation groove part of a film coating the shaft by using a laser beam. CONSTITUTION:The entire surface of the rotary shaft 1 is coated with the film 16 which has a critical point smaller than the critical point of laser machining. A laser beam to be modulated which is emitted by a laser generation device 17 is deflected and scanned by a rotary polygon mirror 18, transmitted through image forming lenses 19a and 19b, and synchronized by a synchronism detection sensor 20 and while the rotary shaft 1 is rotated, the film 16 on the rotary shaft 1 except at the dynamic pressure generation groove part is removed with the laser beam to form the rotary shaft 1 coated with the film 16 only at parts which become grooves. Further, the rotary shaft 1 is dipped in etching liquid to stick plating material 21 on the part other than the film 16. Then the remaining film 16 is removed to manufacture the rotary shaft 1 which has the dynamic pressure generation grooves 22.
申请公布号 JPH052144(A) 申请公布日期 1993.01.08
申请号 JP19910178835 申请日期 1991.06.24
申请人 CANON INC 发明人 HORI HIROFUMI
分类号 F16C17/10;F16C33/14;G02B26/10;G02B26/12 主分类号 F16C17/10
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