| 摘要 |
A probe card (8,18) for testing unencapsulated semiconductor devices (7,17) wherein the probe card (8,18) is made from a semiconductor material (10). A plurality of pyramidally shaped conductive protrusions or probe tips (11,41) project from the surface of the probe card (8,18) to mate with electrode pads on an unencapsulated semiconductor device (7,17) to be tested. The probe tips (11,41) are formed using standard etch techniques, hence they can be configured to contact electrode pads that reside on the unencapsulated semiconductor device in either a peripheral or area array. Further, the probe card (8,18) is capable of testing integrated circuits in either wafer or die form.
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