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发明名称
POLYCRYSTALLINE SILICON THIN FILM AND TRANSISTOR USING THE SAME
摘要
申请公布号
US5177578(A)
申请公布日期
1993.01.05
申请号
US19900574865
申请日期
1990.08.30
申请人
TONEN CORPORATION
发明人
KAKINOKI, HISASHI;NAGAHARA, TATSURO;FUKUI, KEITARO
分类号
H01L21/20;H01L21/205;H01L21/324;H01L21/336;H01L21/84;H01L29/04;H01L29/786
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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