发明名称 A wafer basket.
摘要 <p>A wafer basket in which the recesses provided for the engagement with the basket lifter are each formed with a dent at the upper and innermost corner of the recess, and a pair of stays are provided at the lower bent portions of the side walls in a manner such that the upper edges of the stays are of the same height and elevated to the extent that the downward movement of the wafers is checked by the stays rather than by the ribs. <IMAGE></p>
申请公布号 EP0520106(A1) 申请公布日期 1992.12.30
申请号 EP19910305898 申请日期 1991.06.28
申请人 SHIN-ETSU HANDOTAI COMPANY, LIMITED 发明人 NAITO, NAOKI;TAKAMATSU, NAOYUKA;ISHIKAWA, TOSHIO;KOSHIKAWA, KAZUNORI
分类号 H01L21/673 主分类号 H01L21/673
代理机构 代理人
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