NANOMETER SCALE PROBE FOR AN ATOMIC FORCE MICROSCOPE, AND METHOD FOR MAKING SAME

摘要

Methods are described for producing a needle probe tip having prescribed magnetic properties for a scanning magnetic force microscope (MFM) on a substrate positioned in an evacuated environment. A substantially rigid, nanometer-scale needle-like structure is produced by selective decomposition of a volatile organometallic compound by a highly focussed electron beam. Processing steps are described to obtain the prescribed magnetic properties of such a needle probe structure; in particular, the fabrication of a single magnetic domain, with hard or soft magnetic properties at the distal end of the needle structure. These magnetic sensing probes allow magnetic imaging at the nanometer-scale level.