| 摘要 |
<p>PURPOSE:To provide forceps for a wafer, which can effectively grasp even a large-sized, heavy-weight wafer without dropping the wafer. CONSTITUTION:The forceps comprises a forceps body 1, a substantially circular- arc-shaped wafer support 2 so mounted on the body 1 as to prevent drop of a wafer W by reciprocating along the peripheral edge of the wafer W grasped by the body 1 to support the wafer W, a gear 3 to be engaged with a toothed part 2A formed on the outer periphery of the support 2, a motor 4 for rotatably driving the gear 3, and a switch 5 for energizing the motor 4.</p> |
