FILM FORMATION PROCESS EQUIPMENT,申请号JP19910169175-传众专利搜索

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发明名称	FILM FORMATION PROCESS EQUIPMENT
摘要
申请公布号	JPH04368119(A)	申请公布日期	1992.12.21
申请号	JP19910169175	申请日期	1991.06.14
申请人	TEL VARIAN LTD	发明人	NAKADA TAKESHI;KOIZUMI MASAHITO
分类号	C30B25/12;H01L21/205	主分类号	C30B25/12
代理机构		代理人
主权项
地址

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