发明名称 FORMATION OF BUMP ELECTRODE
摘要 PURPOSE:To provide a method of forming bump electrodes on a semiconductor chip by arranging conductive particles on electrodes arranged on the semiconductor chip. CONSTITUTION:Only an electrode 2 on a semiconductor chip 1 is coated with an adhesive 5 by screen printing. Conductive particles 4 are sprayed onto the semiconductor chip 1 by means of compressed air, so that particles 4 are deposited only on a tacky adhesive 5, thereby forming bump electrodes on the semiconductor chip.
申请公布号 JPH04364734(A) 申请公布日期 1992.12.17
申请号 JP19910139330 申请日期 1991.06.12
申请人 SEIKO EPSON CORP 发明人 YAMAZAKI YASUO
分类号 H01L21/60;H01L21/321 主分类号 H01L21/60
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