SIN ENTHALTENDE BEDECKUNGEN FUER ELEKTRONISCHE SCHALTUNGEN.
摘要
<p>A method of forming at low temperatures silicon- and nitrogen-containing ceramic or ceramic-like coatings for the protection of electronic devices. The coatings are produced by the ceramification at temperatures of, or below, 400 degrees Centigrade of preceramic silicon nitrogen-containing polymer coatings deposited from a solvent solution. The coatings are useful for planarizing the surfaces of electronic devices and for passivation.</p>
申请公布号
DE3782623(D1)
申请公布日期
1992.12.17
申请号
DE19873782623
申请日期
1987.10.09
申请人
DOW CORNING CORP., MIDLAND, MICH., US
发明人
HALUSKA, LOREN ANDREW;BANEY, RONALD HOWARD;SNOW, SARAH SEVERSON, MIDLAND MICHIGAN, US;TARHAY, LEO, SANFORD MICHIGAN, US;MICHAEL, KEITH WINTON, MIDLAND MICHIGAN, US
