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发明名称
FILM FORMING DEVICE
摘要
申请公布号
JPH04362172(A)
申请公布日期
1992.12.15
申请号
JP19910137438
申请日期
1991.06.10
申请人
MITSUBISHI ELECTRIC CORP
发明人
ITO HIROMOTO
分类号
C23C14/32;H01L21/203;H01L21/363
主分类号
C23C14/32
代理机构
代理人
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地址
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