| 摘要 |
PURPOSE:To suppress the plasma from generating between a nozzle and an object to be worked in the course of laser beam machining, and to stabilize the capacitance between a nozzle and the object to be worked. CONSTITUTION:The laser beam machine is provided with a capacitance sensor for obtaining a detection value corresponding to a capacitance between a nozzle 1 and an object 4 to be worked by applying AC power between both of them, a DC power source 9 for obstructing the generation of plasma by applying a DC high voltage between both of them 1, 4, and a capacitor 11 and an inductor 10 for obstructing DC and AC, respectively. Also, this machine is provided with the capacitance sensor, and a DC power source for obstructing the generation of plasma by applying a DC high voltage to the outside periphery of the nozzle and the space between a conductor ring having a gap and the object to be worked. Since the capacitance between the nozzle and the object to be worked in the course of laser beam machining is stabilized, working can be executed with high accuracy. |
