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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04357840(A)
申请公布日期
1992.12.10
申请号
JP19910132594
申请日期
1991.06.04
申请人
HITACHI LTD
发明人
KOKETSU MASAMI;WATANABE KIKUO;ISOMAE SEIICHI
分类号
H01L21/322;H01L21/324
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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