发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 <p>PURPOSE:To enable a semiconductor integrated circuit device in a multilayer interconnection structure to be enhanced in electrical reliability, degree of integration, and operational speed and another semiconductor integrated circuit device in a multilayer connection structure where a memory aggregate and a logic section are constituted through a Bi-CMOS technique to be enhanced in electrical reliability, degree of integration, and operational speed. CONSTITUTION:In a semiconductor integrated circuit device 2 provided with a multilayer interconnection structure, a first wiring 32 formed of conductive material higher than that of a second wiring 36 provided to an upper wiring layer in allowable current density per unit area is provided to a lower wiring layer, and the product of the cross-sectional area in a wiring widthwise direction and the allowable current density of the first wiring 32 is set nearly equal to that of the second wiring 36.</p>
申请公布号 JPH04355952(A) 申请公布日期 1992.12.09
申请号 JP19910219736 申请日期 1991.08.30
申请人 HITACHI LTD 发明人 OOGAYA KAORU;OWADA NOBUO
分类号 H01L21/82;H01L21/768;H01L23/522 主分类号 H01L21/82
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