| 摘要 |
PURPOSE:To improve the characteristic of a solar battery by forming such a diffusion layer that is less in fluctuation of sheet resistance and life time and has a long life time on the surface of a semiconductor substrate. CONSTITUTION:A diffusion layer is formed on the surface of a semiconductor substrate 2 in an oxidative atmosphere 3 by using a pyrolytic solid boron nitride diffusion source 1 as a diffusion source. |
